NB INSTRUMENT
SALD R&D Spatial ALD Platform
Atomic-level coating control with the speed and flexibility to take research from the laboratory toward production.
Atomic precision, at research speed.
Spatial ALD separates precursor and co-reactant gases into distinct zones. As the substrate moves beneath the deposition head, self-limiting surface reactions build conformal coatings one atomic layer at a time.
SALD’s R&D platform is designed to explore coating recipes at atmospheric pressure, with a path from lab work to sheet-to-sheet and roll-to-roll processing.
A different way to build a thin film.
Instead of pulsing reactants sequentially in time, the process separates them in space to support continuous deposition.
Conformal coatings
Self-limiting reactions control thickness and composition, including on complex surfaces.
Atmospheric process
Coating without the vacuum chamber and pumping cycle required for conventional temporal ALD.
Scalable research
Develop processes with a route toward continuous sheet-to-sheet and roll-to-roll production.
Protected atmosphere option
A glovebox version supports oxygen- and moisture-sensitive research.
Flexible deposition head
Explore gas zones, co-reactants and optional plasma-enhanced processing.
Substrate versatility
Works with flat, porous and structured research substrates.
R&D process window.
| Operating temperature | 25–350 °C |
|---|---|
| Exposure time | 2 ms to 10 s |
| Coating uniformity | Less than 1% thickness variation (manufacturer-stated) |
| Process environment | Atmospheric; optional protected-atmosphere glovebox |
| Substrates | Glass, silicon wafers, metal sheets and foils; porous and 2.5D materials |
| Production pathway | Sheet-to-sheet and roll-to-roll scaling |
Technical information referenced from SALD’s Spatial ALD technology and R&D system pages; final configuration is application-dependent.
A platform for emerging surfaces.
- Solar cells and perovskite research
- Battery materials
- Green hydrogen technologies
- Barrier and packaging coatings
- Advanced semiconductor and functional materials
Tell us what you are working on.
Start with the research objective. We’ll help connect the requirement to the right technology path.
Discuss your requirement