Diagram of an ion source, broad ion beam and wafer inside a vacuum chamber
Ion Beam Systems · Nordiko

Ion Beam Milling System 7500

Broad ion-beam processing for precision thin-film milling and surface preparation.

Ion beam technology

A controlled beam, directed at the surface.

Nordiko describes a gridded ion source that forms a broad beam by drawing positive ions from a low-pressure plasma and accelerating them through perforated electrodes.

In milling, energetic ions physically remove material from a substrate. The process is especially relevant where conventional chemical etching is less suitable, including noble metals and magnetic thin films.

Nordiko ion beam milling system and control cabinet
Process

From plasma to precise patterning.

01

Broad ion beam

A gridded accelerator forms beamlets that merge into a broad beam for thin-film processing.

02

Physical milling

Ion impact removes material through sputtering rather than relying solely on chemical reactions.

03

Beam neutralisation

Nordiko describes a filament-less plasma-bridge neutraliser for its broad ion-beam systems.

04

Reactive option

Reactive gases may be introduced in the source or at the substrate, depending on the process approach.

Specification

Ion-beam process principles.

TechnologyGridded broad ion-beam milling / etching
Typical process beam range200–2,000 V (Nordiko's published technology range; not a confirmed 7500-system specification)
Processing environmentLow-pressure vacuum
Process modesPhysical ion milling; reactive ion-beam approaches described by Nordiko
NeutralisationPlasma-bridge neutraliser described for Nordiko broad ion-beam systems

Nordiko's ion-beam technology page explains the process, but does not publish a model-specific 7500 datasheet. Confirm system configuration and performance before procurement.

Applications

Thin films that need a different approach.

  • Noble-metal thin-film patterning
  • Magnetic-film and MRAM research
  • Precision ion-beam etching
  • Surface preparation and thin-film development
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